C43 / C44 series - Pressure sensor DIEs for high burst pressure requirements in the automotive and industrial segment
The high precision of piezoresistive sensors and their ability to measure absolute, gauge and differential pressure make them suitable for a wide range of applications in the increasingly demanding requirements for industrial and automotive segment. Core component of each pressure sensor is the sensing element or the so-called DIE, which converts the pressure into an electrical output.
General information piezo-resistive technology
TDK provides a wide range of highly accurate, piezoresistive pressure sensing MEMS DIEs at different pressure ranges and footprints. TDK DIEs offer high sensitivity and versatile design features for enhanced media resistance, ease of processing, and the ability to provide a reliable and stable signal over lifetime.
Description of C43 / C44 product family
The C43 and C44 DIEs provide gauge, front and backside absolute pressure measurements options and are available with an operating pressure range from 0 … 10 bar up to 0 … 40 bar at a temperature range of -40 °C to +150 °C.
The C43 / C44 product family is an extension of the successful C32 DIE series.
Especially for the C44 backside absolute, the media pressure is applied from the backside of the DIE, thus it allows a clear separation between electronics on the topside and application fluids or gasses within the application.
Highlight features of C43 / C44 DIEs
1. Increased burst pressure
The C43 / C44 series complement the TDK pressure sensor DIE portfolio for high-pressure applications with a significantly increased burst pressure of up to 150bar.
This serious burst pressure increase is made possible due to larger anodic glass bond area and reduced cavity volume.
2. Long term stability
High long-term stability of output signal over lifetime, which is typically within ±0.10 % of the output signal at full scale. Furthermore, an electric shielding is implemented direct into the MEMS layer systems to reduce electromagnetic and electrochemical impacts on the DIE’s performance.
3. Further opportunities for existing sensor packages
Existing customers with higher burst pressure requirements can use the C43 and C44 in the same sensor package as for the current C32.
The C43 / C44 series is an extension of the successful C32 DIE family.
It has the same bond pad layout, footprint and bond pad height as the existing C32 DIE, but with higher burst pressures.
Optional special features for MEMS DIEs C44